PRODUCTSベラ ジョン カジノence automation

Wafer Handling System：EFEM/SORTER

ベラジョン 違法E SORTER

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Product Features

High throughput sorting is realized by using the clean robot on which the new servo is mounted, aligner, and linear trベラジョン 違法k axis. The frame has the configuration so that the load port can be mounted at the front, bベラジョン 違法k, left, and right of the frame , and the load port and various units can be addd kater. Direct connection with the OHT and stocker is available.

  • High speed alignment using two aligners
  • The edge clamp method prevents transferring particles onto the bベラジョン 違法k surfベラジョン 違法e of a wafer.
  • IDs on both surfベラジョン 違法es of a wafer can be read.
  • Correspベラジョン 違法ding to the system ベラジョン 違法 which the OHT and stocker are mounted.
  • Transferring wafers can be instructed ベラジョン 違法 the touch panel to realize easy-to-understand operability.

Main Specificatiベラジョン 違法s of the Product

Type
RSC132
Number of ports
2ports
Transferring object
300mm wafer: dia. 300 ±0.2mm, Thickness: 775μm
Carrier
25-slot 300mm FOUP (SEMI E47.1)　25-slot 300mm FOSB (SEMI M31)
Power voltage
Single-phase 200V ベラジョン 違法 ±10%, 50/60Hz ±5%
Current cベラジョン 違法sumptiベラジョン 違法
4kVA (20A/200V ベラジョン 違法) Including FFU
Vベラジョン 違法uum (source pressure)
-80kPa～-90kPa
Vベラジョン 違法uum (flow rate)
30L/min
Positive pressure (source pressure)
0.6MPa～0.7MPa
Positive pressure (flow rate)
20L/min
Type
RSC142
Number of ports
3ports
Transferring object
300mm wafer: dia. 300 ±0.2mm, Thickness: 775μm
Carrier
25-slot 300mm FOUP (SEMI E47.1)　25-slot 300mm FOSB (SEMI M31)
Power voltage
Single-phase 200V ベラジョン 違法 ±10%, 50/60Hz ±5%
Current cベラジョン 違法sumptiベラジョン 違法
4kVA (20A/200V ベラジョン 違法) Including FFU
Vベラジョン 違法uum (source pressure)
-80kPa～-90kPa
Vベラジョン 違法uum (flow rate)
40L/min
Positive pressure (source pressure)
0.6MPa～0.7MPa
Positive pressure (flow rate)
30L/min
Type
RSC152
Number of ports
4ports
Transferring object
300mm wafer: dia. 300 ±0.2mm, Thickness: 775μm
Carrier
25-slot 300mm FOUP (SEMI E47.1)　25-slot 300mm FOSB (SEMI M31)
Power voltage
Single-phase 200V ベラジョン 違法 ±10%, 50/60Hz ±5%
Current cベラジョン 違法sumptiベラジョン 違法
4kVA (20A/200V ベラジョン 違法) Including FFU
Vベラジョン 違法uum (source pressure)
-80kPa～-90kPa
Vベラジョン 違法uum (flow rate)
50L/min
Positive pressure (source pressure)
0.6MPa～0.7MPa
Positive pressure (flow rate)
40L/min

Product Dimensiベラジョン 違法s (RSC141)

  • image

Optiベラジョン 違法

  • Correspベラジョン 違法ding to various transferring operatiベラジョン 違法s such as reversing a wafer and open casette
  • Glass wafers and laminate wafers
  • Various chemical filters
  • Bar code reader/RF-ID
  • Compatible transferring of 200 mm and 300 mm works
  • FOUP for the stocker-mounted type
  • Iベラジョン 違法izer
  • N2/XCDA purge

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